Design and Analaysis of MEMS-based Pressure Sensor

S. Nagar¹ , M.Z. Ansari²

Section:Research Paper, Product Type: Isroset-Journal
Vol.5 , Issue.6 , pp.28-31, Jun-2019

Online published on Jun 30, 2019

Copyright © S. Nagar, M.Z. Ansari . This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
 

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Abstract :
In this work development of a pressure sensor for continuous monitoring pressure of the liquid is proposed. Pressure sensors are required in all fields like automobile, domestic application, defense, biomedical and aerospace application. In this work an assemblage of MEMS pressure sensor that can measure the pressure of the liquid. In this assembly, we used the combination of Strain gauge and diaphragm. This sensor can operate at high temperatures and harsh environments involving corrosive fluids. This Sensor has the potential of determining the velocity of liquid with more accuracy and repeatability. This sensor designing and simulation were performed by COMSOL Multiphysics.

Key-Words / Index Term :
MEMS, Strain Gauge, diphragm, COMSOL

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